What kind of vacuum pump does ULVAC use?

Low Temperature Pumps The LR Series pump is designed for either Load Lock or PVD processes. Ulvac 's Unique Aluminum Design Allows for Very Uniform Temperature Distribution Throughout the Pump Body. The HR Series pump is designed for CVD and Etch processes.

What do you need to know about the ULVAC UR series?

The Ulvac UR Series Pump is Designed for Applications That Require a Heated Pump, Heated Gas Lines, and/or Heated Exhaust Lines. Excellent Helium Pumping Capability Canned motor for safety and ease of maintenance. Power Failure Protection Pump withstands power interruptions of up to 500ms duration.

Can a ULVAC pump be used for etch?

Ulvac has focused the design efforts into maintaining an extremely uniform high temperature throughout all pump stages making this series pump optimal for CVD and Etch applications. Ulvac 's ECO-SHOCK can be added to the LR/HR/UR pump for additional energy savings of up to 70% for any light processes including pumping air or nitrogen.

How to download a vacuum pump user manual?

Ideal Vacuum | Vacuum Pump User Manuals PDF Downloads Free PDF Downloads of User Manuals for Vacuum Pumps, Dry Scroll Pumps, Turbo Pumps, Ion Pumps, Vacuum Systems, Diffusion Pumps, Diaphragm Pumps, Screw Pumps, Piston Pumps, Rotary Vane Pumps, Semiconductor Pumps, & Roots Blowers. Skip to main content

Ulvac - Finder Manual

Listing Results Ulvac

About 18 results and 4 answers.

Manual/Spec sheet – ULVAC Download Center

Ulvac Download Center TOP > Manual/Spec sheet. 211 Manual/Spec sheet was found. 1〜12 / 211. Next. Instruction manual_MBS-053.-01 0.58 MB [pdf] to Download List. Instruction manual_UFW-003 ... Search Instruction Manual by product name / key word. Search. Search instruction manual in product category. Rough and Middle Vacuum Pump(103)

Ulvac Manuals - Vacumetrics

Ulvac Manuals. HELiOT 900. Ulvac HELiOT 900 Operations Manual. Heliot 301. Ulvac Heliot 301 Instruction Manual.

ICP-RIE ULVAC NE-550 operation manual Manualzz

Using chiller The chiller is always running. 6/8 ICP-RIE Ulvac NE-550 operation manual (2017/02/13) If you have changed it, always set back the chiller temperature to 20°C after use. 15.1. Press the SELECT button to enter in the setting menu. 15.2. Press SETTING → ENTER → when the temperature is displayed, press ENTER again. 15.3.

ULVAC Download Center

to Download List. Turbo Molecular Pumping System. YTP ver.B. 2.78 MB [pdf] to Download List. Roll to Roll General Catalog. 40.19 MB [pdf] to Download List. Electronic Device General Catalog.

ULVAC

Features. No re-calibration is needed after changing gauge head cable length. Built-in temperature assurance circuit reduces the effect of ambient temperature changes on specified values. Independent set point output (3 points/GP-1000G, 2points/GP-2001G, GP-2002G) BCD output (GP-1000G)

ULVAC - Rotary Vane Pumps

VS 650A/750A Single Stage. Robust, install-anywhere, industrial vacuum solution. View Details and Specs Request Engineering Information Request a Demo.

ULVAC - Enviro

ENVIRO-1Xa. Advanced plasma resist strip system specifically designed for non-300mm fabs. Equipped with a versatile platform that can handle the complete line of wafer sizes from 4" to 8". View Details and Specs Request Engineering Information Request a Demo.

Kurt J. Lesker Company ULVAC® GLD Series Rotary Vane

Manual Description Part Number Price In Stock Add To Cart Accessories; Pump Model Inlet Flange Voltage & Phases Manual Description ... Ulvac Repair Kit for GLD-040 Pumps Repair Kit: GLD040MAK $241.00 : GLD-137AA/137CC: Ulvac Repair Kit for GLD …

Search for Vacuum pump Products Introduction ULVAC KIKO Inc.

You can easily search Ulvac KIKO's vacuum pumps with the convenient narrowing down function such as displacement and ultimate pressure.

G-101D ULVAC KIKO Inc.

G-101D. This is a rotary blade type vacuum pump that uses lubricating oil. A vacuum pump with low noise, low vibration and high reliability. G series is a standard type. The oil rotary vacuum pump which had abundant track records and realized budget prices.

Ideal Vacuum Vacuum Pump User Manuals PDF Downloads

Dry Screw Pump. Pfeiffer Hepta 100 200 and 300-P Dry Screw Pump Instruction Manual.pdf (3.35 MB) Pfeiffer Hepta 400-P Dry Screw Pump Operating Instructions.pdf (5.57 MB) Pfeiffer Hepta 630-P Dry Screw Pump Operating Instructions.pdf (11 MB) Dry Semiconductor Pumps. Alcatel ADP & ADS Dry Semiconductor Vacuum Pumps.pdf (2.82 MB)

C30VR ULVAC CRYOGENICS INC

Ulvac CRYOGENICS INCORPORATED Head Office and Factory 1222-1 yabata,Chigasaki,Kanagawa,253-0085,Japan TEL:+81-467-85-9366 FAX:+81-467-85-9356

Frequently Asked Questions

What kind of vacuum pump does ULVAC use?

Low Temperature Pumps The LR Series pump is designed for either Load Lock or PVD processes. Ulvac's Unique Aluminum Design Allows for Very Uniform Temperature Distribution Throughout the Pump Body. The HR Series pump is designed for CVD and Etch processes.
What do you need to know about the ULVAC UR series?

The Ulvac UR Series Pump is Designed for Applications That Require a Heated Pump, Heated Gas Lines, and/or Heated Exhaust Lines. Excellent Helium Pumping Capability Canned motor for safety and ease of maintenance. Power Failure Protection Pump withstands power interruptions of up to 500ms duration.
Can a ULVAC pump be used for etch?

Ulvac has focused the design efforts into maintaining an extremely uniform high temperature throughout all pump stages making this series pump optimal for CVD and Etch applications. Ulvac's ECO-SHOCK can be added to the LR/HR/UR pump for additional energy savings of up to 70% for any light processes including pumping air or nitrogen.
How to download a vacuum pump user manual?

Ideal Vacuum | Vacuum Pump User Manuals PDF Downloads Free PDF Downloads of User Manuals for Vacuum Pumps, Dry Scroll Pumps, Turbo Pumps, Ion Pumps, Vacuum Systems, Diffusion Pumps, Diaphragm Pumps, Screw Pumps, Piston Pumps, Rotary Vane Pumps, Semiconductor Pumps, & Roots Blowers. Skip to main content